Skip to main content
English
中文
Log In
Log in
Log in with ORCID
NTU Single Sign On
Have you forgotten your password?
Home
College of Engineering / 工學院
Industrial Engineering / 工業工程學研究所
The detection and the control of machine/chamber mismatching in semiconductormanufacturing
Details
The detection and the control of machine/chamber mismatching in semiconductormanufacturing
Journal
Winter Simulation Conference
Journal Volume
2018-December
Pages
3583-3591
Date Issued
2019
Author(s)
Chouichi, A.
Blue, J.
Yugma, C.
Pasqualini, F.
JAKEY BLUE
DOI
10.1109/WSC.2018.8632460
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/467293
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85062635813&doi=10.1109%2fWSC.2018.8632460&partnerID=40&md5=897e4b1d8285bfba2ab9d2ad635c98a8
SDGs
[SDGs]SDG9
Type
conference paper
