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College of Science / 理學院
Chemistry / 化學系
Self-reducible CuII source reagents for the CVD of copper
Details
Self-reducible CuII source reagents for the CVD of copper
Journal
Chemical Vapor Deposition
Journal Volume
7
Journal Issue
1
Pages
28-31
Date Issued
2001
Author(s)
Hsu, P.-F.
Chi, Y.
Lin, T.-W.
Liu, C.-S.
Carty, A.J.
SHIE-MING PENG
DOI
10.1002/1521-3862(200101)7:1<28
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-0003143523&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/292797
Type
journal article