Novel three-dimensional beam tracking system for stationary-sample type atomic force microscopy
Resource
Instrumentation and Measurement Technology Conference, 2004. IMTC 04. Proceedings of the 21st IEEE
Journal
Proceedings of the 21st IEEE Instrumentation and Measurement Technology Conference
Pages
1985-1989
Date Issued
2004-05
Date
2004-05
Author(s)
DOI
1091-5281
Abstract
The stationary-sample type atomic force microscope (AFM) has been demonstrated to have many advantages over conventional scanning-sample type AFM. However, a higher degree of instrumentation complexity has to be adopted to measure the deflection of a 3-dimensional moving probe in the stationary-sample type AFM. This paper proposes a novel stationary-sample type AFM with a laser beam tracking system. We devise an innovative method to minimize "false deflection". Our system has been verified to achieve high scanning speed without sacrificing high accuracy.
SDGs
Type
journal article
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