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College of Electrical Engineering and Computer Science / 電機資訊學院
Electronics Engineering / 電子工程學研究所
A novel layout decomposition algorithm for triple patterning lithography
Details
A novel layout decomposition algorithm for triple patterning lithography
Journal
Design Automation Conference
Pages
1185-1190
Date Issued
2012
Author(s)
Fang, S.-Y.
Chang, Y.-W.
YAO-WEN CHANG
DOI
10.1145/2228360.2228579
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84863544659&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/372709
Type
conference paper
