The Study and Fabrication of Trigger Probe for Micro/Nano CMM
Date Issued
2006
Date
2006
Author(s)
Hung, Po-Yuan
DOI
zh-TW
Abstract
In modern metrological technology, traditional coordinate measuring machine is suitable for measuring almost all median size workpiece’s three-dimensional features. But in micro-size scale, it is always not to fit higher precision and lower uncertainties demands. In almost all cases, the probing system is the limiting factor of the measurement. In order to overcome the limits of the probing system’s performance, many research centers use so expensive instruments as sensors and invest in manufacturing a probe. Therefore, how to research a high precision touch trigger probing system in limited funds is this study’s aim.
About manufacturing a probe, we use the cleaning feature of a commercial fiber fusion splicer to manufacture 3D micro probes. By utilizing the arc discharging energy and the surface tension of the melting optical fiber, a micro sphere is formed at the tip of the optical fiber. About the sensor, we use the commercial pickup head of DVD player. By the mechanical design with the pickup head, a touch trigger probing system with lightweight, low probing force, high resolution, fine repeatability will be developed.
Subjects
微探頭
光纖熔融
三次元
雷射讀取頭
Micro sphere probe
Fiber fusion
CMM
DVD
Type
thesis
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