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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Positional Error Compensation of a Precision Microstage
Details
Positional Error Compensation of a Precision Microstage
Resource
J. of CSME 19 (6): 543-548
Journal
J. of CSME
Journal Volume
19
Journal Issue
6
Pages
543-548
Date Issued
1998
Date
1998
Author(s)
Fan, K.C.
Lin, C.Y.
Shyu, L.H.
URI
http://ntur.lib.ntu.edu.tw//handle/246246/86552
Type
journal article
