Optical beam induced current microscopy at DC and radio frequency
Journal
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Journal Volume
1
Pages
84
Date Issued
2003
Author(s)
Abstract
In this paper we have made a comparison of optical beam induced current (OBIC) imaging with DC and radio frequency (RF) contrast on a photodetector. The DC and RF contrasts are generated by a cw argon-krypton ion laser and a mode-locked TUsapphire laser, respectively. We have found that OBIC mapping at RF would allow profiling of the device's spatial distribution of temporal response. Thus the use of a pulsed laser in OBIC would contribute one more dimension in semiconductor device metrology. © 2003 IEEE.
Other Subjects
Argon lasers; Nanostructures; Photonics; Radio waves; Semiconductor devices; Semiconductor lasers; Krypton ion lasers; Mode-locked; Optical beam induced currents; Radio frequencies; Temporal response; Pulsed lasers
Type
conference paper