Multiobjective lot scheduling and dynamic OHT routing in a 300-mm wafer fab.
Journal
Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Singapore, 12-15 October 2008
Pages
1608-1613
Date Issued
2008
Author(s)
Abstract
In this paper, we solve two problems in a 300-mm wafer fabrication facility (fab). Firstly, for the lot scheduling problem, we propose a multi-objective genetic programming based rule generator (MOGPRG) to evolve useful dispatching rules, which can provide near-optimal lot schedules concerning multiple objectives. Secondly, the overhead hoist transports (OHT) routing problem is considered. As the modern automated material handling system (AMHS) is capable of doing toolto-tool direct delivery, the congestion of OHTs may happen more often than the past. To deal with the traffic congestion in AMHS, a dynamic routing method is proposed to find the nearshortest and less-congested path for the OHT to travel along. It can reduce the traffic congestion and achieve fast lot delivery by adapting to the dynamic traffic environment. The proposed MOGPRG is integrated with the dynamic routing method to improve two fab performance metrics: mean cycle time and tardy rate. Experimental results show the effectiveness of the proposed MOGPRG and dynamic routing method. © 2008 IEEE.
SDGs
Other Subjects
Automated material handling systems; Congested paths; Dispatching rules; Dynamic routing methods; Dynamic traffic environment; Fab performance; Lot scheduling problem; Lot-scheduling; Mean cycle time; Multi objective; Multiobjective evolutionary algorithm; Multiple objectives; Overhead hoist transport (OHT) routing; Overhead hoist transports; Production scheduling; Routing problems; Rule generator; Wafer fab; Wafer fabrications; Control theory; Cybernetics; Genetic algorithms; Genetic programming; Hoists; Materials handling; Multiobjective optimization; Problem solving; Production engineering; Routing algorithms; Scheduling algorithms; Semiconductor device manufacture; Traffic congestion
Type
conference paper