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Great reduction of interfacial traps in Al 2 O 3/GaAs (100) starting with Ga-rich surface and through systematic thermal annealing
Journal
Device Research Conference 2010
Pages
51-52
Date Issued
2010
Author(s)
Chang, YC
Merckling, C
Penaud, J
Lu, CY
Brammertz, G
Wang, WE
Kwo, J
Dekoster, J
Caymax, M
others
Type
conference paper