Influence of the mask magnification on imaging in hyper-NA lithography

Resource

Journal of the Optical Society of America A-Optics Image Science and Vision 24 (6): 1633-1640

Journal

Journal of the Optical Society of America A-Optics Image Science and

Journal Volume

Vision

Journal Issue

6

Pages

1633-1640

Date Issued

2007

Date

2007

Author(s)

Lin, Chun-Hung

Ko, Fu-Hsiang

DOI

URI

Type

journal article

File(s)

Name

30.pdf

Size

943.23 KB

Format

Adobe PDF

Checksum

(MD5):4c9848acd2576864c586de9e8a836f67