High-speed microlithography aerial image simulation without four-dimensional singular-value decomposition

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6924

Date Issued

2008

Author(s)

CHUNG-PING CHEN

DOI

10.1117/12.774048

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/501077

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-45449095691&doi=10.1117%2f12.774048&partnerID=40&md5=babbbb756d66e0867160df531ddbcdc9

Type

conference paper