Performance of Thin Valveless One-side Actuating Diaphragm Micropump

A novel designed of valveless diaphragm micropump is consisted of chamber, the middle passage, import and export of pipe. By using one-side piezoelectric (PZT) as actuating device, the diaphragm by middle passage will be divided into the active area by direct force from PZT and the passive area affected by the fluid flow. Experimental direction is the gradual enhancement of micropump performance. First, in the light of characteristics of one-side actuating design entrance location and find the reason of flow rate generation. We know that the vibration of diaphragm in passive area is an important role in order to improve the performance of micropump. Take this feature to enlarge the passive area of diaphragm. Later, middle passage width is reduced for micropump flow resistance. Then change the location of PZT fixed end, to confirm the passive area of diaphragm as flow control and flow amplification components. In simulation to see the vibration phenomenon of each node in passive area of diaphragm obtain two key points to achieve high performance in micropump. One is to reduce the distance from diaphragm to the exit, the other is to reduce the number of more large displacement position of the whole diaphragm. Therefore, using high of 0.3 mm, 10 x 10 mm2 size shim placed in the chamber of passive area of diaphragm for verify the simulation. We would get under the 70 Hz the maximum average flow rate 101.5 ml/min, pressure head height 21.3 cm of performance and a wide range of flow rate on the frequency distribution.