Fabrication of nanoscale PtO<inf>x</inf>/PZT/PtO<inf>x</inf> capacitors by e-beam lithography and plasma etching with photoresist mask

Journal

Electrochemical and Solid-State Letters

Journal Volume

9

Journal Issue

3

Date Issued

2006

Author(s)

Huang, C.-K.

Chen, Y.-H.

Liang, Y.-C.

Wu, T.-B.

Chen, H.-L.

Chao, W.-C.

DOI

10.1149/1.2162339

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491352

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-31044433043&doi=10.1149%2f1.2162339&partnerID=40&md5=3b017df6abdf23f9cd26193663956677

Type

journal article