Low-Cost Nanofabrication of Semiconductor Optoelectronic Devices using Nanosphere Lithography
Date Issued
2016
Date
2016
Author(s)
Chen, Yen-Chang
Abstract
In this dissertation, we will demonstrate the fabrication of various nanoscale optoelectronic devices using a low-cost nanofabrication method developed from Nanosphere Lithography (NSL). First, we will discuss how to use a top-down nanofabrication approach to fabricate silicon nanonet field-effect transistors (FETs). We will also discuss the electric properties of these FETs and apply them for biosensing application. In the final part of this these, I will discuss how to use the two-step etch technique and regular photolithography to fabrication InGaN/GaN cavity LED. The basic electric and optical properties will also be discussed.
Subjects
Nanospherical-lens Lithography
Nanospherical Lithography
field-effect transistors
light-emitting diode
laser diode
Type
thesis
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ntu-105-R03941089-1.pdf
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