MEMS Surface Coating Condition Monitoring via Nonlinear Tapping of Resoswitches

Journal

IFCS 2018 - IEEE International Frequency Control Symposium

Date Issued

2018

Author(s)

Lu, S.-C.

Du, W.-R.

Huang, Y.-C.

Tsai, C.-P.

Li, W.-C.

DOI

10.1109/FCS.2018.8597573

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486392

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85061835894&doi=10.1109%2fFCS.2018.8597573&partnerID=40&md5=160d445ea6222c1a1d2a3d10b90019e0

Type

conference paper