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Analytical Applications of Focused Ion Beams
Resource
Electron-Beam, X-ray and Ion-Beam Techniques for Submicrometer Lithographies IV, p.117-125
Journal
Electron-Beam, X-ray and Ion-Beam Techniques for Submicrometer Lithographies IV
Pages
117-125
Date Issued
1986
Date
1986
Author(s)
Wang, Yuh-Lin
Type
conference paper