A Piezoelectric/elastic Spring-Coupled Surface Profiler
Resource
Sensors and Actuators A: Physical,120(2),327-324.
Journal
Sensors and Actuators A: Physical
Journal Volume
120
Journal Issue
2
Pages
327-324
Date Issued
2005-05
Date
2005-05
Author(s)
Chang, S. H.
Chou, C. C.
Type
journal article