Micro-System Displacement and Profile Measurement by an Integrated Photon Tunneling and Confocal Microscope

Resource

The Chinese Journal of Mechanics 18 (4): 173-183

Journal

The Chinese Journal of Mechanics

Journal Volume

18

Journal Issue

4

Pages

173-183

Date Issued

2002

Date

2002

Author(s)

Chen, Wen-Jong

Huang, Long-Sun

Chu, Ta-Shun

Yeh, W.-F.

Lu, Shui-Shong

Cheng, Ying-Chou

DOI

URI

File(s)

Name

05.pdf

Size

951.53 KB

Format

Adobe PDF

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