A plastic-fibre-bundle-based transducer array for mapping and detection of the end point for dissolution of a photoresist
Journal
Measurement Science and Technology
Journal Volume
12
Journal Issue
3
Pages
273-277
Date Issued
2001
Author(s)
Abstract
Dynamical mapping of the development of a photoresist by use of a two-dimensional plastic-optical-fibre-bundle (POFB)-based transducer array is demonstrated in this work. The performance of a lens-free POFB transducer for in situ detection of the end point of the development of a photoresist is discussed. An improved optical collecting efficiency of up to 5-6 dB under a normal-detection scheme is achieved. The dissolution rate and thickness can be temporally resolved by this system with a standard deviation of less than 1.5%. The noise-equivalent power of the POFB transducer is as small as 100 nW Hz-1/2 with the use of a modulated laser source.
SDGs
Type
journal article