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Imaging SIMS at 20 nm Lateral Resolution:Exploratory Research Applications
Resource
Secondary Ion Mass Spectrometry:SIMS V, v.132-138
Journal
Secondary Ion Mass Spectrometry:SIMS V
Journal Volume
v.132-138
Pages
-
Date Issued
1987
Date
1987
Author(s)
Wang, Yuh-Lin
Publisher
Berlin: Springer-Verlag
Type
conference paper