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Development of Rolling Micro-stamping Process
Date Issued
2005
Date
2005
Author(s)
Fang, Huang-Sheng
DOI
zh-TW
Abstract
This thesis is devoted to the development of rolling micro-stamping process. This process combines the advantages of soft mold, UV-curable resist and rolling fabrication. In this process, the soft mold made of PDMS is covered on roller surface, UV-curable ink is then coated on the PDMS mold, and through contact during rolling operation, the patterns are transferred to the resist on the substrate. Three micro-structures, i.e. grating of width 20μm and depth 30μm, grating of width 100μm and depth 30μm, and micro-lens of diameter 150μm and height 30μm, have been stamped onto the resist cured on glass substrate successfully.
Several insights are also obtained from this study:
(1) Coating UV-curable resin into PDMS micro-cavity and transferring to substrate by stamping achieve stable replication;
(2) Applying vacuum and UV curing are key to the success of the micro-stamping process;
(3) Velocity is the most important processing parameter since moving too fast will reduce the curing time;
(4) Pressure is also important since too high pressure will cause distortion in mold patterns.
In this study, a micro-stamping machine and system are setup, and a rolling micro-stamping process is established. The system is used successfully to print grating, micro-structures and to print black matrix onto glass substrates. The potential of the rolling micro-stamping is demonstrated.
Several insights are also obtained from this study:
(1) Coating UV-curable resin into PDMS micro-cavity and transferring to substrate by stamping achieve stable replication;
(2) Applying vacuum and UV curing are key to the success of the micro-stamping process;
(3) Velocity is the most important processing parameter since moving too fast will reduce the curing time;
(4) Pressure is also important since too high pressure will cause distortion in mold patterns.
In this study, a micro-stamping machine and system are setup, and a rolling micro-stamping process is established. The system is used successfully to print grating, micro-structures and to print black matrix onto glass substrates. The potential of the rolling micro-stamping is demonstrated.
Subjects
滾輪
軟微影
PDMS印章
UV固化阻劑
Roller
PDMS stampe
Soft Lithography
UV-curable resist
Type
thesis
File(s)
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Name
ntu-94-R92522710-1.pdf
Size
23.53 KB
Format
Adobe PDF
Checksum
(MD5):58161519bfa89195b350016fed797a9a