An optical flatness measurement system for medium-sized surface plates

Resource

Precision Engineering 21 (2-3): 102-112

Journal

Precision Engineering

Journal Issue

21

Pages

102-112

Date Issued

1997

Date

1997

Author(s)

Fan, Kuang-Chao

Shiou, Fang-Jung

URI

Type

journal article

File(s)

Name

02.pdf

Size

828.54 KB

Format

Adobe PDF

Checksum

(MD5):59e3d9fe2a140a9ba4a0e606e27b97f0