Whispering-gallery Modes and Light Emission from Silicon-Nanocrystal-Embedded Microdisk Resonators
Date Issued
2015
Date
2015
Author(s)
Kuo, Mei-Chia
Abstract
We have successfully fabricated optically active microdisk resonators with Si nanocrystals grown by plasma enhanced chemical vapor deposition (PECVD) and the post-annealing process. The room-temperature photoluminescence from single microdisk shows the characteristic modal structure of whispering-gallery modes in the wavelength between 600nm and1000nm. We fabricated Si-nanocrystal-embedded microdisk resonators by two different lithography processes. We use standard lithography to fabricate the microdisk resonators with diameters of 10μm and 20μm and electron-beam lithography for 4-μm, 6-μm, 8-μm and 10-μm-diameter disks. The quality factors of 8μm and 10μm disks can reach 1200 and 2400 respectively. We also fabricated thicker 10-μm-diameter disks to increase the confinement of the disk. We can also use Si-nc/SiO2 superlattice as the active layer in the microdisk resonators and the WGMs were observed clearly Finally, we discussed the relation between pump power and output power. We observed the saturation of the excitable nanocrystals at low pump power and the linewidth broadening with pump power increasing due to the excited carrier absorption (ECA).
Subjects
Microdisk
Si nanocrystal
Type
thesis
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