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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
The design of rapid thermal process for large diameter applications [semiconductor wafer processing]
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The design of rapid thermal process for large diameter applications [semiconductor wafer processing]
Resource
Semiconductor Manufacturing Technology Workshop, 1998
Journal
Semiconductor Manufacturing Technology Workshop
Pages
-
Date Issued
1998-06
Date
1998-06
Author(s)
Liu, C.W.
Lee, M.H.
Chao, C.Y.
Chen, C.Y.
Yang, C.C.
Chang, Y.
CHEE-WEE LIU
CHIH-CHUNG YANG
DOI
10.1109/SMTW.1998.722653
DOI
N/A
URI
http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021711
Type
journal article
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Name
00722653.pdf
Size
585.03 KB
Format
Adobe PDF
Checksum
(MD5):69b88787ded06b28d0ac6d1d3d1bac62
