Characteristics Measurement and Jitter-Reduction of MEMS Scanning Mirror System
Date Issued
2006
Date
2006
Author(s)
HSU, KUO-CHI
DOI
en-US
Abstract
Micro-Electro-Mechanical System (MEMS) has the properties of light, small, strong and fast response time. A new research territory of MOEMS is formed by the combination of optical and MEMS technology. Among these optical components, MEMS scanning mirror can be used to reflect the incident light to different angle by the time-variant rotating. Because MEMS scanning mirror provides the high resolution and large scanning angle without the limitation of wavelength, it is widely used in different application of industrial and science.
The MEMS scanning mirror used in this thesis is designed to replace the polygon mirror which is commonly used in the laser printer. Because of the variation of input signal and the defect of manufacture, the MEMS scanning mirror has the problem of Jitter which is defined as the speed fluctuation. The property of MEMS scanning mirror is defined by the amount of Jitter. How to measurement the property of MEMS scanning mirror and how to reduce the Jitter become important issues. The existing method of jitter-reduction is to re-design the system. In order to achieve the requirement of specification, the design should be changed repeatedly. It costs lots time and money for manufacture. In this thesis, the measurement system is set up and the feedback control for jitter-reduction is proposed. There are two parts in the thesis. The first part is the set up of measurement system which provides automatically acquirement of the dynamic characteristic of MEMS scanning mirror. The second part is the design of feedback control for jitter-reduction. The design of feedback control provides the reduction of Jitter and stabilization of Jitter in certain range.
Subjects
微機電掃瞄面鏡
特性量測
抖動量
MEMS scanning mirror
Characteristics measurement
Jitter
Type
thesis