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20 nm silicon nanorods fabricated by reactive ion etch
Resource
Nanotechnology, 2004. 4th IEEE Conference on
Journal
4th IEEE Conference on Nanotechnology, 2004.
Pages
-
Date Issued
2004-08
Date
2004-08
Author(s)
DOI
N/A
Type
journal article
File(s)
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Name
01392393.pdf
Size
238.15 KB
Format
Adobe PDF
Checksum
(MD5):348ce56b98ab7b40624b15af9827e068