X-ray Absorption Spectroscopy Approaches to Electronic State and Coordination Type of Lithium Phosphorus Oxynitride Thin Films
Journal
Journal of the Chinese Chemical Society
Journal Volume
59
Journal Issue
10
Pages
1270-1274
Date Issued
2012
Author(s)
Abstract
Abstract In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li 3 PO 4 ) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X‐ray diffraction, scanning electron microscope, X‐ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X‐ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P‐N valence states of hybrid orbitals were increased with increasing the nitrogen amounts.
SDGs
Type
journal article