Numerical studies of variations in gap бо finger width ratio and traveled distance for the driving force of RF MEMS device using Dual BEM

Journal

Proceedings of the institution of mechanical engineers, Part C: Journal of mechanical science

Journal Volume

218

Pages

1243-1253

Date Issued

2004

Author(s)

Y.S. Liao

S.W. Chyuan

J.T. Chen

URI

Type

journal article