Thermal conductivity of Si/SiGe superlattice film

Journal

ASME Micro/Nanoscale Heat Transfer International Conference

Journal Volume

PART A

Pages

365-369

ISBN

0791842924; 9780791842928

Date Issued

2008

Author(s)

Liu C.-K.

Chien H.-C.

Dai M.-J.

Yu C.-K.

Hsu C.-Y.

Luo G.-L.

DOI

10.1115/MNHT2008-52183

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-49449088713&doi=10.1115%2fMNHT2008-52183&partnerID=40&md5=8b0a2ca219e1897ff6f9f8918f189f72

https://scholars.lib.ntu.edu.tw/handle/123456789/411159

SDGs

[SDGs]SDG7

Type

conference paper