Lissajous Hierarchical Local Scanning to Increase the Speed of Atomic Force Microscopy

Journal

IEEE Transactions on Nanotechnology

Journal Volume

14

Journal Issue

5

Pages

810-819

Date Issued

2015

Author(s)

Wu, J.-W.

Lin, Y.-T.

Lo, Y.-T.

Liu, W.-C.

DOI

10.1109/TNANO.2015.2445712

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/488901

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960336369&doi=10.1109%2fTNANO.2015.2445712&partnerID=40&md5=ac488ddacdbce3c7bffcbf207fbf211e

Type

journal article