The growth of high-quality SiGe films with an intermediate Si layer

Journal

Thin Solid Films

Journal Volume

447-448

Pages

302-305

Date Issued

2004

Author(s)

Lee, S.W.

Chen, P.S.

Tsai, M.-J.

Chia, C.T.

Liu, C.W.

Chen, L.J.

DOI

10.1016/S0040-6090(03)01068-X

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/502094

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-1342281314&doi=10.1016%2fS0040-6090%2803%2901068-X&partnerID=40&md5=66c90e312e73a90b147bca39736dfa28

Type

conference paper