Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns
Journal
Scientific Reports
Journal Volume
6
Journal Issue
1
Date Issued
2016
Author(s)
Shisheng Xiong
Robert M Jacobberger
Solomon Mikael
Hyo Seon Suh
Chi-Chun Liu
Dalong Geng
Xudong Wang
Michael S Arnold
Zhenqiang Ma
Paul F Nealey
Abstract
Directed self-assembly of block copolymers is a scalable method to fabricate well-ordered patterns over the wafer scale with feature sizes below the resolution of conventional lithography. Typically, lithographically-defined prepatterns with varying chemical contrast are used to rationally guide the assembly of block copolymers. The directed self-assembly to obtain accurate registration and alignment is largely influenced by the assembly kinetics. Furthermore, a considerably broad processing window is favored for industrial manufacturing. Using an atomically-thin layer of graphene on germanium, after two simple processing steps, we create a novel chemical pattern to direct the assembly of polystyrene-block-poly(methyl methacrylate). Faster assembly kinetics are observed on graphene/germanium chemical patterns than on conventional chemical patterns based on polymer mats and brushes. This new chemical pattern allows for assembly on a wide range of guiding periods and along designed 90° bending structures. We also achieve density multiplication by a factor of 10, greatly enhancing the pattern resolution. The rapid assembly kinetics, minimal topography and broad processing window demonstrate the advantages of inorganic chemical patterns composed of hard surfaces. © 2016, The Author(s).
Type
journal article