Development of a resonance micro-cantilever beam bio-sensor
Date Issued
2011
Date
2011
Author(s)
Chen, Lu-Jung
Abstract
Based on the atomic force microscopy and the technology of fiber interferometry, this study designed the resonant based micro-cantilever beam bio-sensors which can be classified as traditional resonant micro-cantilever beam bio-sensors, resonant micro-cantilever beam plating with Cr/Au in different block bio-sensors, and suspended microchannel resonator without channel packaging bio-sensors. Based on the fact that the resonant frequency of cantilevers would change with their mass, biomedical detection would be proceed by measuring the resonant frequency shift, and this study chose immune detection technique to detect C-reactive protein (CRP) which was immobilized on micro-cantilever using surface micromachining technique. Two types of sensor-chips, traditional resonant micro-cantilever beam bio-sensors and resonant micro-cantilever beam plating with Cr/Au in different block bio-sensors, were used to detect the different concentrations of CRP solution (1000 μg/mL and 1 μg/mL). A distinct change in the resonant frequency of micro-cantilever was observed as a function of time. Resonant frequency decreased rapidly over 66% from initial value in 30 minutes of C-reactive protein antigen-antibody interacted. As a result, the resonant based micro-cantilever beam bio-sensors in this study offers advantages including the miniaturization of devices, the improvement of stability, the reduction of environmental impacts and costs.
Subjects
MEMS
resonant based micro-cantilever
bio-sensor
fiber interferometry
Type
thesis
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