A High Speed Servo Design for AFM Nano-machining
Date Issued
2007
Date
2007
Author(s)
Chang, Hsu-Yu
DOI
zh-TW
Abstract
This thesis first time demonstrated the use of scanning probe microscope (SPM) lithography for three-dimensional nano-machining. The previous researches have applied different AFM tip forces to produce scraping marks with different depths. Our previous study also showed the need of high performance servo to produce even scraping marks. In this thesis, we first introduced the procedure for high performance tip servo design. The results with different servo controllers showed a dramatic difference when the controller was not properly tuned. The system was then used to produce square marks at different depths. With the limited working depth for the SPM lithography, our experiments showed very clear distinction among the different depth marks. With very careful tool path design, we showed how to machine slanted surfaces and eventually the machining of a pyramidal structure.
Subjects
原子力顯微鏡(AFM)
安定時間
振動
LQG with I控制器
Atomic Force Microscope(AFM)
settle time
vibration
LQG with I Controller
Type
thesis
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