A circular micromirror array fabricated by a maskless post-CMOS process

Resource

Microsystem Technologies 11: 444-451

Journal

Microsystem Technologies

Journal Volume

11

Journal Issue

6

Pages

444-451

Date Issued

2005

Date

2005

Author(s)

Cheng, Ying-Chou

Dai, Ching-Liang

Lee, Chi-Yuan

DOI

URI

Type

journal article

File(s)

Name

07.pdf

Size

683.67 KB

Format

Adobe PDF

Checksum

(MD5):d2ddadea0548b6d02dfc4cd6132d1e67