A Six-degree-of-freedom measurement system for the accuracy of X-Y Stage

Resource

Precision Engineering 24 (1): 15-23

Journal

Precision Engineering

Journal Volume

24

Journal Issue

1

Pages

15-23

Date Issued

2000

Date

2000

Author(s)

Fan, K.C.

Chen, M. J.

URI

Type

journal article

File(s)

Name

12.pdf

Size

769.52 KB

Format

Adobe PDF

Checksum

(MD5):710e52a0066e0e80434e13c474600e11