Oxidation of Chemically Vapor-Deoposited Silicon Nitride in Dry Oxygen at 1923 to 2003 K
Resource
Journal of American Ceramic Society, v.76 n.4 p.1047-1051
Journal
Journal of American Ceramic Society
Journal Volume
v.76 n.4 p.1047-1051
Pages
-
Date Issued
1993
Date
1993
Author(s)
Lin, Ray Y.
Type
journal article