Design and fabrication of phononic crystals in surface acoustic micro devices

Resource

MEMS 2006 Istanbul. 19th IEEE International Conference on Micro Electro Mechanical Systems, 686-689

Journal

MEMS 2006 Istanbul. 19th IEEE International Conference on Micro Electro Mechanical Systems

Pages

686-689

Date Issued

2006

Date

2006

Author(s)

Gu, K.-B.

Chang, Chienliu

Shieh, J.-C.

Shih, W.-P.

DOI

URI

Type

conference paper

File(s)

Name

79.pdf

Size

23.42 KB

Format

Adobe PDF

Checksum

(MD5):26f108cf08d781ca45ed8162d5b0d863