Multimode interference couplers using polymeric optical waveguides
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
4579
Pages
84-91
Date Issued
2001
Author(s)
Abstract
Polymeric optical waveguides are fabricated by using optical polymer benzocyclobutene BCB). The properties of BCB include good thermal stability and high optical transmission. Anisotropic etching of BCB has been characterized by reactive ion etching. The output mode distribution has been examined by CCD measurement system. Also, an optical coupler based on multimode interference (MMI) effect has been designed and fabricated. We show that such MMI couplers can offer superior properties such as low excess loss and good tolerance to the variation of wavelength. The measurement results are presented.
SDGs
Type
conference paper