The Electrical Characteristics of Metal/SiO2/InSb Capacitor Fabricated by Photo-Enhanced Chemical Vapor Deposition

Resource

Journal of Vacuum Science and & Technology Bulletin, v.7 n.5., p.1115-1121

Journal

Journal of Vacuum Science and & Technology Bulletin

Journal Volume

v.7 n.5.

Pages

1115-1121

Date Issued

1990

Date

1990

Author(s)

Yang, Seng-Jenn

URI

Type

journal article