Ruthenium oxide metal nanocrystal capacitors with high-kappa dielectric tunneling barriers for nanoscale nonvolatile memory device applications
Resource
Microelectronic Engineering, 87(10), 1821-1827
Journal
Microelectronic Engineering
Journal Volume
87
Journal Issue
10
Pages
1821-1827
Date Issued
2010
Date
2010
Author(s)
Das, Atanu
Maikap, S.
Lin, C.-H.
Tzeng, P.-J.
Tien, T.-C.
Wang, T.-Y.
Chang, L.-B.
Yang, J.-R.
Type
journal article
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Format
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