Measurements of Cavity Resonances in 2-D Si-Based Phononic-Crystal Plates
Date Issued
2010
Date
2010
Author(s)
Shan, Kuan-Luan
Abstract
In recent years, there is a great interest in the study of periodically arranged composite elastic materials called phononic crystals. The most important phenomenon of the phononic crystal is that there is no wave propagation in a specific frequency range due to the band gap effect. Accordingly, a resonant cavity can be constructed by removing one or several lines of periodic fillers from a phononic structure.
In this thesis, the Finite Element (FE) Method is adopted to predict the dispersion relation of two-dimensional air/silicon phononic crystal plates. The transmission coefficient of a resonant cavity is calculated and discussed with different layers of phononic crystals. Based on the simulated results, ZnO/Au/Si layered plates with square lattice Air/Silicon phononic crystals were fabricated by the CMOS process in order to detect and study the characteristics of the resonant mode.
The experimental results show a resonant mode exists at about 196 MHz. The effect of resonant cavity with phononic crystals is in a good agreement with the numerical predictions. In addition, the results show that the Quality factor of the resonant mode can be increased up to about 1227 using six layers of the phononic crystals.
Subjects
Lamb waves
phononic crystal plate
Band gap
IDTs
resonant cavity
Type
thesis
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