Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography
Journal
Sensors (Switzerland)
Journal Volume
13
Journal Issue
1
Pages
865-874
Date Issued
2013-01
Author(s)
WEI-CHENG TIAN
Yu-Hsuan Ho
Chao-Hao Chen
Chun-Yen Kuo
Abstract
In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO(2) nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R(0) to 0.1 R(0)) of 3.2/17.5 s and a corresponding sensor response (ΔR/R(0)) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
SDGs
Type
journal article