Postfitting Control Scheme for Periodic Piezoscanner Driving
Resource
Japanese Journal of Applied Physics 45 (3B): 1917-1921
Journal
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Journal Volume
45
Journal Issue
3 B
Pages
1917-1921
Date Issued
2006
Date
2006
Author(s)
Abstract
The hysteresis and other nonlinear properties of piezoelectric scanners cause image distortion in scanning probe microscopy (SPM). Two types of control algorithm, feedback and feedforward, were applied to solve this problem. In general, a feedforward control method has a higher scanning speed, a higher resolution, but a lower accuracy than a feedback control method. In this paper, we propose a postfitting control scheme for driving the x-scanner of SPM periodically. This method possesses the advantages of both the feedback and feedforward methods, and achieves a higher image resolution and a higher accuracy than a pure feedback or feedforward method, without sacrificing scanning speed.
Subjects
Feedback control; Feedforward control; Hysteresis; Piezoelectric nonlinearity; Scanning probe microscopy
SDGs
Other Subjects
Algorithms; Hysteresis; Image analysis; Microscopic examination; Piezoelectric devices; Problem solving; Scanning; Feedforward control; Piezoelectric nonlinearity; Scanning probe microscopy (SPM); Feedback control
Type
journal article
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