Postfitting Control Scheme for Periodic Piezoscanner Driving
Resource
Japanese Journal of Applied Physics 45 (3B): 1917-1921
Journal
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Journal Volume
45
Journal Issue
3 B
Pages
1917-1921
Date Issued
2006
Date
2006
Author(s)
Subjects
Feedback control; Feedforward control; Hysteresis; Piezoelectric nonlinearity; Scanning probe microscopy
Other Subjects
Algorithms; Hysteresis; Image analysis; Microscopic examination; Piezoelectric devices; Problem solving; Scanning; Feedforward control; Piezoelectric nonlinearity; Scanning probe microscopy (SPM); Feedback control
Type
journal article
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32.pdf
Size
322 KB
Format
Adobe PDF
Checksum
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