Development of Transparent Microelectrode Arrays Chip and System
Date Issued
2007
Date
2007
Author(s)
Chiu, Yue-Tzu
DOI
zh-TW
Abstract
本研究主要嘗試自行開發透明式微電極陣列(Microelectrode Array,MEA)晶片與量測平台，期能輔以光學量測應用於斑馬魚心肌組織或神經細胞，以及其他生物之電生理訊號觀察。
研究中微電極陣列晶片利用微機電製程技術製作，晶片製作上以玻璃為基底材料，導線層、生物接觸的電極介面層使用透明導電材料-銦錫氧化物(Indium tin oxide)，晶片上佈有64個微電極以8 × 8陣列式排列，微電極大小為40 × 40 μm2; 此外，晶片上亦製作參考電極(Ag/AgCl)以方便生物實驗之量測。
製作完成後之晶片，其電氣特性，直流阻抗為4.69 Kohms、交流阻抗在1 KHz下為427.23 Kohms；而透明度部份，在可見光520 nm波段下穿透率可達約90 %之穿透率。此外，整合於晶片上之參考電極Ag/AgCl經由電化學循環伏安法的測試，驗證亦能提供系統穩定之準位。
另一方面，研究中所設計之量測平台可應映試驗需求以方便拆卸更換感測晶片，且可配合不同的生物電生理訊號量測，量測平台包括晶片電連接夾具、64組類比處理電路和類比轉數位之同步擷取訊號等部份，依序傳輸生物訊號至電腦端，且使用LabVIEW人機介面軟體作訊號即時陣列式顯示以及後續之處理。
A transparent micro-electrode array (MEA) chip and measurement platform have been designed and realized for optical recording of bio-potential signals simultaneously. MEMS techniques are applied to fabricate MEA chip on glass substrate, on which the conductive wire is achieved by using transparent conducting metal oxide, Indium Tin Oxide (ITO). The MEA chip has 64 micro-electrodes arranged in 8×8 array format, each with feature size of 40×40μm2 in spatial size. In addition, it also has on chip reference electrode (Ag/AgCl) which can provide stable potential for electrophysiological recording in biological experiments.
The measurement platform includes chip holder, 64-channel analog circuits, NI PXI-2530 and NI PXI-5102. A LabVIEW-based graphic user interface is designed for signal processing and display.
Subjects
微機電系統製程
透明式微電極陣列晶片
氧化銦錫
參考電極
量測平台
電生理訊號
Micro-Electro-Mechanical System
Transparent Microelectrode Array
Indium Tin Oxide
Reference electrode
Measurement platform
Electrophysiological signal.
Type
thesis
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