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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Stochastic simulation of photon scattering for EUV mask defect inspection
Details
Stochastic simulation of photon scattering for EUV mask defect inspection
Journal
Advanced Lithography 2010 - Proc. SPIE
Pages
763624
Date Issued
2010-02
Author(s)
Ting-Hang Pei
Kuen-Yu Tsai
KUEN-YU TSAI
JIA-HAN LI
DOI
10.1117/12.846695
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/359311
Type
conference paper
