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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Method for Compensating Proximity Effects of Particle Beam Lithography Processes
Details
Method for Compensating Proximity Effects of Particle Beam Lithography Processes
Date Issued
2013-09
Author(s)
Kuen-Yu Tsai
Chun-Hung Liu
Chooi-Wan Ng
Pei-Lin Tien
KUEN-YU TSAI
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/381491
Type
patent
