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Advances in high & kappa gate dielectrics for Si and III-V semiconductors
Journal
2002 International Conference on Molecular Beam Epitaxy
Pages
47-48
Date Issued
2002
Author(s)
Kwo, J
Busch, B
Muller, DA
Chabal, YJ
Kortan, AR
Mannaerts, JP
Yang, B
Ye, P
Gossmann, H
others
Type
conference paper