Design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array driven by a leverage mechanism

We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles are ± 6.7° at 75 V for both axes, leading to total optical scan angle of 26.8°. The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for 1 × N2 wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 μm is also attained. © 2006 IEEE.