Nanolithography made from water-based spin-coatable LSMO resist
Resource
Nanotechnology,17,4399-4404.
Journal
Nanotechnology
Journal Issue
17
Pages
4399-4404
Date Issued
2006-08
Date
2006-08
Author(s)
Chuang, Chih-Min
Ming-ChungWu
Huang, Yu-Ching
Cheng, Kuo-Chung
Type
journal article